Pankratov EL. On Prognosis of Changing of the Rate of Diffusion of Radiation Defects, Generated during Ion Implantation, with Increasing of Depth of their Penetration: On Prognosis of Changing of the Rate of Diffusion of Radiation Defects, Generated during Ion Implantation, with Increasing of Depth of their Penetration. ajms [Internet]. 2019 Sep. 25 [cited 2024 Apr. 20];3(3). Available from: http://ajms.in/index.php/ajms/article/view/218