ON APPROACH TO ESTIMATE SPEED OF GROWTH OF FILMS DURING MAGNETRON SPUTTERING

Main Article Content

E. L. Pankratov

Abstract

In this paper we analyzed mass transfer during the growth of epitaxial layers in magnetrons. We also
estimate growth velocity of the epitaxial layers and analyzed its value as a function of various parameters.

Article Details

How to Cite
Pankratov, E. L. . (2023). ON APPROACH TO ESTIMATE SPEED OF GROWTH OF FILMS DURING MAGNETRON SPUTTERING. Asian Journal of Mathematical Sciences(AJMS), 7(1). https://doi.org/10.22377/ajms.v7i1.474
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Research Article