ON APPROACH TO ESTIMATE SPEED OF GROWTH OF FILMS DURING MAGNETRON SPUTTERING
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Abstract
In this paper we analyzed mass transfer during the growth of epitaxial layers in magnetrons. We also
estimate growth velocity of the epitaxial layers and analyzed its value as a function of various parameters.
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How to Cite
Pankratov, E. L. . (2023). ON APPROACH TO ESTIMATE SPEED OF GROWTH OF FILMS DURING MAGNETRON SPUTTERING. Asian Journal of Mathematical Sciences(AJMS), 7(1). https://doi.org/10.22377/ajms.v7i1.474
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Research Article
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